A class of devices combining electrical and mechanical components that have at least one of the dimensions in the micrometer range (between 1 micron and 1 millimeter). They include sensors, actuators, microducts, and micropumps.
Also Known As:
BioMEMS; MEMS; Micro-Electro-Mechanical Systems; Micro Electrical Mechanical Systems; Micro Electro Mechanical Systems; Micro-Electrical-Mechanical System; Micro-Electro-Mechanical System; System, Micro-Electrical-Mechanical; System, Micro-Electro-Mechanical; Systems, Micro-Electrical-Mechanical; Systems, Micro-Electro-Mechanical